The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Apr. 21, 2008
Chang Auck Choi, Daejeon, KR;
Chang Han Je, Daejeon, KR;
Gunn Hwang, Seoul, KR;
Youn Tae Kim, Daejeon, KR;
Sung Hae Jung, Daegu, KR;
Myung Lae Lee, Daejeon, KR;
Sung Sik Lee, Miryang, KR;
Seok Hwan Moon, Daejeon, KR;
Chang Auck Choi, Daejeon, KR;
Chang Han Je, Daejeon, KR;
Gunn Hwang, Seoul, KR;
Youn Tae Kim, Daejeon, KR;
Sung Hae Jung, Daegu, KR;
Myung Lae Lee, Daejeon, KR;
Sung Sik Lee, Miryang, KR;
Seok Hwan Moon, Daejeon, KR;
Electronics and Telecomunications Research Institute, Daejeon, KR;
Abstract
A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.