The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2012
Filed:
Nov. 14, 2007
Xiao-li Feng, Pasadena, CA (US);
Rassul B. Karabalin, Pomona, CA (US);
John Sequoyah Aldridge, Pasadena, CA (US);
Michael L. Roukes, Pasadena, CA (US);
Xiao-Li Feng, Pasadena, CA (US);
Rassul B. Karabalin, Pomona, CA (US);
John Sequoyah Aldridge, Pasadena, CA (US);
Michael L. Roukes, Pasadena, CA (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
NEMS (Nano-Electro-Mechanical Systems) apparatuses are described. By applying a static electric field, an arm or beam in a NEMS apparatus is made to bend so that one electrical conductor is made to contact another electrical conductor, thereby closing the NEMS apparatus. Some apparatus embodiments make use of electrostatic coupling to cause the arm or beam to bend, and some apparatus embodiments make use of piezoelectric materials to cause the arm or beam to bend. Other embodiments are described and claimed.