The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8258033 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 04, 2012

Filed:

Mar. 22, 2010
Applicant:

Nobutaka Watanabe, Mie-ken, JP;

Inventor:

Nobutaka Watanabe, Mie-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8239 (2006.01);
U.S. Cl.
CPC ...
Abstract

A nonvolatile semiconductor memory device includes: a substrate; a plurality of gate electrodes provided on the substrate, extended in a first direction parallel to an upper surface of the substrate, arranged in a matrix in an up-to-down direction perpendicular to the upper surface and a second direction, and having a through-hole respectively extended in the up-to-down direction, the second direction being orthogonal to both the first direction and the up-to-down direction; an insulation plate provided between the gate electrodes in the second direction and extended in the first direction and the up-to-down direction; a block insulation film provided on an interior surface of the through-hole and on an upper surface and a lower surface of the gate electrodes and being contact with the insulation plate; a charge storage film provided on the block insulation film; a tunnel insulation film provided on the charge storage film; and a semiconductor pillar provided in the through-hole and extended in the up-to-down direction.


Find Patent Forward Citations

Watanabe, Nobutaka. (2012). Method of manufacturing nonvolatile semiconductor memory device (U.S. Patent No. 8258033). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8258033

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