The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2012

Filed:

Mar. 07, 2011
Applicants:

Yong-lae Park, Stanford, CA (US);

Behzad Moslehi, Los Altos, CA (US);

Richard James Black, Menlo Park, CA (US);

Mark R. Cutkosky, Palo Alto, CA (US);

Kelvin K. Chau, Pleasanton, CA (US);

Inventors:

Yong-Lae Park, Stanford, CA (US);

Behzad Moslehi, Los Altos, CA (US);

Richard James Black, Menlo Park, CA (US);

Mark R. Cutkosky, Palo Alto, CA (US);

Kelvin K. Chau, Pleasanton, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G02B 6/00 (2006.01); G01J 1/04 (2006.01); G01L 19/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

A sensor for force is formed from an elastomeric cylinder having a region with apertures. The apertures have passageways formed between them, and an optical fiber is introduced into these passageways, where the optical fiber has a grating for measurement of tension positioned in the passageways between apertures. Optionally, a temperature measurement sensor is placed in or around the elastomer for temperature correction, and if required, a copper film may be deposited in the elastomer for reduced sensitivity to spot temperature variations in the elastomer near the sensors.


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