The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2012

Filed:

Oct. 08, 2008
Applicants:

Johannes Struempfel, Dresden, DE;

Reinhardt Bauer, Dresden, DE;

Andreas Heisig, Dresden, DE;

Andre Ulbricht, Dresden, DE;

Steffen Goerke, Dresden, DE;

Heiko Richter, Pesterwitz, DE;

Falk Schwerdtfeger, Dresden, DE;

Inventors:

Johannes Struempfel, Dresden, DE;

Reinhardt Bauer, Dresden, DE;

Andreas Heisig, Dresden, DE;

Andre Ulbricht, Dresden, DE;

Steffen Goerke, Dresden, DE;

Heiko Richter, Pesterwitz, DE;

Falk Schwerdtfeger, Dresden, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/50 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

In a transport device for elongated substrates, especially in hot processes, which includes an essentially rectangular frame, formed by longitudinal and transverse spars connected to each other, in which at least three transverse spars are provided between two longitudinal spars, at least one transverse spar is made from a material, whose heat expansion coefficient differs from the heat expansion coefficient of the material of the other transverse spars or/and at least one transverse spar is connected force-free to at least one transverse support or/and at least one transverse spar is formed from an open profile.


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