The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Mar. 31, 2009
Gayatri Eadara Perlin, Ann Arbor, MI (US);
Brendan E. Casey, Ann Arbor, MI (US);
Mayurachat Ning Gulari, Ann Arbor, MI (US);
Kensall D. Wise, Ann Arbor, MI (US);
Gayatri Eadara Perlin, Ann Arbor, MI (US);
Brendan E. Casey, Ann Arbor, MI (US);
Mayurachat Ning Gulari, Ann Arbor, MI (US);
Kensall D. Wise, Ann Arbor, MI (US);
The Regents of The University of Michigan, Ann Arbor, MI (US);
Abstract
A microsystem comprising a substrate having an aperture formed therethrough. The aperture includes a first cross-section and a second cross-section—the first cross-section being smaller than the second cross-section to define a ledge therebetween. A probe member is disposed within the aperture of the substrate, such that a backend of the probe member defines a cross-section that is greater than the first cross-section of the aperture and smaller than the second cross-section such that the probe member engages the ledge. A plurality of probe shanks extend from the probe member. Each of the probe shanks includes a plurality of leads disposed there along. Each of the leads extending from the probe shanks to an opposing side of the probe member.