The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Aug. 26, 2009
Aaron M. Hunter, Santa Cruz, CA (US);
Jiping LI, Palo Alto, CA (US);
Rajesh S. Ramanujam, Cupertino, CA (US);
Thomas Haw, Portland, OR (US);
Aaron M. Hunter, Santa Cruz, CA (US);
Jiping Li, Palo Alto, CA (US);
Rajesh S. Ramanujam, Cupertino, CA (US);
Thomas Haw, Portland, OR (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.