The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Nov. 30, 2009
Akira Arakawa, Kyoto, JP;
Takahiro Mori, Kyoto, JP;
Tsunehiro Inoue, Omihachiman, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
The present invention provides a particle counter capable of sensitively determining the contamination level of a light transmission window. The particle counter according to the present invention includes: a light sourcefor emitting light through a light incident windowto a measurement areain a vacuum state or in an approximately vacuum state; a scattered light detectorfor detecting scattered light through a detection window, the scattered light being generated when a light is delivered to the measurement area; a vacuum gaugefor measuring the pressure of the measurement area; a signal processorfor converting a detection signal of the scattered light into an electrical signal; and a contamination level determinerfor determining the contamination level of the transmission window from the time average of the electrical signal and the pressure.