The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Sep. 17, 2009
Applicants:
Michael J. Zolock, Berthoud, CO (US);
Alexei V. Smirnov, Fort Collins, CO (US);
Inventors:
Michael J. Zolock, Berthoud, CO (US);
Alexei V. Smirnov, Fort Collins, CO (US);
Assignee:
Hitachi Metals, Ltd., Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 31/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
A temperature insensitive mass flow controller comprising a main flow line, a capillary tube coupled to the main flow line across a bypass a thermal sensing element coupled to the capillary tube and a mass flow controller housing adapted to at least cover the capillary tube. A first heat sink has been coupled to the mass flow controller internal to the mass flow controller housing and coupled to the capillary tube. The heat sink being adapted to control a temperature of a gas in the capillary tube.