The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2012

Filed:

Apr. 02, 2009
Applicants:

Young Joon Baik, Seoul, KR;

Won Mok Kim, Seoul, KR;

Kyeong Seok Lee, Pohang-si, KR;

Jong-keuk Park, Seoul, KR;

Jeung-hyun Jeong, Seoul, KR;

Suyoun Lee, Yongin-si, KR;

Taek Sung Lee, Seoul, KR;

Inventors:

Young Joon Baik, Seoul, KR;

Won Mok Kim, Seoul, KR;

Kyeong Seok Lee, Pohang-si, KR;

Jong-Keuk Park, Seoul, KR;

Jeung-hyun Jeong, Seoul, KR;

Suyoun Lee, Yongin-si, KR;

Taek Sung Lee, Seoul, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); B05D 1/36 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed is a method for growing a thin film, which includes modifying a surface grain size and surface roughness on a thin film to improve the mobility of a carrier and a light scattering effect. The method for growing a thin film includes: forming nuclei of grains having various grain orientations on a substrate; causing first grains having a first specific grain orientation to grow predominantly among the grains having various grain orientations, thereby forming a first preferred texture comprised of the predominantly grown first grains; and then causing second grains having a second grain orientation to grow predominantly, thereby forming a second preferred texture comprised of the predominantly grown second grains, wherein the surface grain size of each of the second grains forming the second texture is larger than that of each of the first grains forming the first texture.


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