The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2012
Filed:
Sep. 28, 2009
Ko Ishizuka, Saitama, JP;
Ko Ishizuka, Saitama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A displacement measurement apparatus includes a first diffraction grating transmitting light from a light source and producing diffracted beams including first to third diffracted beams output in different directions; a second diffraction grating movable together with an object to be measured, provided in a plane parallel to the first diffraction grating, and reflecting the first to third diffracted beams transmitted through the first diffraction grating; a first photodetector receiving the first and second diffracted beams diffracted by the second diffraction grating; a second photodetector receiving at least the third diffracted beam transmitted through the first diffraction grating; and a calculation unit calculating displacement of the object in a first direction in accordance with the beams received by the first photodetector, and displacement of the object in a second direction, different from the first direction, in accordance with the beam received by the second photodetector.