The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Mar. 24, 2008
Theodoros E. Anemikos, Milton, VT (US);
Phillip L. Corson, Westford, VT (US);
Mete Erturk, St. Albans, VT (US);
Ezra D. B. Hall, Richmond, VT (US);
Anthony J. Perri, Jericho, VT (US);
Sebastian T. Ventrone, South Burlington, VT (US);
Theodoros E. Anemikos, Milton, VT (US);
Phillip L. Corson, Westford, VT (US);
Mete Erturk, St. Albans, VT (US);
Ezra D. B. Hall, Richmond, VT (US);
Anthony J. Perri, Jericho, VT (US);
Sebastian T. Ventrone, South Burlington, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Disclosed are embodiments of a system and a method that allow for wireless and dynamic intra-process (i.e., during and/or between process steps) measurements of integrated circuit parameters. The embodiments incorporate the use of a passive circuit, such as an inductor-capacitor-resistor (LCR) circuit resonator, that has a predetermined sensitivity to process variations in one or more physical or electrical integrated circuit parameters. The passive circuit can be wirelessly interrogated between and/or process steps. Then, the actual behavior exhibited by the passive circuit in response to the interrogation is compared to the expected behavior of an optimal circuit in the absence of process variations in order to determine the one or more parameters. Also disclosed is an embodiment of an exemplary passive circuit that can be used to implement the disclosed system and method embodiments.