The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Dec. 26, 2006
Kelly Bruland, Portland, OR (US);
Mark Unrath, Portland, OR (US);
Stephen Swaringen, Rockwall, TX (US);
Ho Wai Lo, Portland, OR (US);
Clint Vandergiessen, Beaverton, OR (US);
Keith Grant, Aloha, OR (US);
Kelly Bruland, Portland, OR (US);
Mark Unrath, Portland, OR (US);
Stephen Swaringen, Rockwall, TX (US);
Ho Wai Lo, Portland, OR (US);
Clint Vandergiessen, Beaverton, OR (US);
Keith Grant, Aloha, OR (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.