The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2012

Filed:

Feb. 08, 2011
Applicants:

Bradley N Engel, Chandler, AZ (US);

Phillip G. Mather, Chandler, AZ (US);

Jon M. Slaughter, Tempe, AZ (US);

Inventors:

Bradley N Engel, Chandler, AZ (US);

Phillip G. Mather, Chandler, AZ (US);

Jon M. Slaughter, Tempe, AZ (US);

Assignee:

Everspin Technologies, Inc., Chandler, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/09 (2006.01); G01R 33/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A fabrication process and apparatus provide a high-performance magnetic field sensor () from two differential sensor configurations () which require only two distinct pinning axes () which are formed from a single reference layer () that is etched into high aspect ratio shapes () with their long axes drawn with different orientations so that, upon treating the reference layers with a properly aligned saturating field () and then removing the saturating field, the high aspect ratio patterns provide a shape anisotropy that forces the magnetization of each patterned shape () to relax along its respective desired axis. Upon heating and cooling, the ferromagnetic film is pinned in the different desired directions.


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