The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2012

Filed:

Dec. 22, 2009
Applicants:

Gyoo-chul JO, Gyeonggi-do, KR;

Ki-sung Chae, Gyeonggi-do, KR;

Inventors:

Gyoo-Chul Jo, Gyeonggi-do, KR;

Ki-Sung Chae, Gyeonggi-do, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract

An etchant includes hydrogen peroxide (HO), and a mixed solution including at least one of an organic acid, an inorganic acid, and a neutral salt.


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