The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Dec. 20, 2007
Jean-charles Barbe, Grenoble, FR;
Erwan Dornel, Vern sur Seiche, FR;
François DE Crecy, Seyssins, FR;
Joël Eymery, Sassenage, FR;
Jean-Charles Barbe, Grenoble, FR;
Erwan Dornel, Vern sur Seiche, FR;
François De Crecy, Seyssins, FR;
Joël Eymery, Sassenage, FR;
Commissariat a l'Energie Atomique, Paris, FR;
Abstract
The invention relates to a method for forming microcavities () of different depths in a layer () based on at least an amorphous or monocrystalline material, comprising at least the following steps in which: at least one shaft and/or trench is formed in the layer () so as to extend through one face () thereof, such that two sections of the shaft and/or the trench, in two different planes parallel to the face (), are aligned in relation to one another along an alignment axis forming a non-zero angle with a normal to the plane of said face (); and the layer () is annealed in a hydrogenated atmosphere so as to transform the shaft and/or trench into at least two microcavities ().