The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8236134 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 07, 2012

Filed:

Jul. 08, 2005
Applicant:

Ho-chul Kang, Seoul, KR;

Inventor:

Ho-Chul Kang, Seoul, KR;

Assignee:

Jusung Engineering Co., Ltd., Gwangju-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
Abstract

A gas distributor for a plasma apparatus includes: a body having a plurality of injection holes, the body being divided into a lower portion and an upper portion with respect to a center surface; and a body supporting unit connected to the lower portion.


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Kang, Ho-Chul. (2012). Gas distributor and apparatus using the same (U.S. Patent No. 8236134). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8236134

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