The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Jun. 24, 2010
Tohru Kiuchi, Higashikurume, JP;
Hideo Mizutani, Yokohama, JP;
Tohru Kiuchi, Higashikurume, JP;
Hideo Mizutani, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
Six auxiliary sheet holders SHand SHtemporarily holding a sheet S are minutely driven in the −Z-axis direction by a control device so that holding surfaces thereof are positioned on the slightly lower side (−Z side) of the holding surface of the sheet holder SH. Accordingly, an appropriate tension is applied to the sheet S in the width direction (Y-axis direction) and the longitudinal direction, so that the center portion of the sheet S is fixed onto the holding surface of the sheet holder SH. That is, in the state where an XY two-dimensional tension is applied to a separate area SAof the sheet S, a rear surface portion corresponding to the separate area SAof the sheet S is changed in accordance with the flat shape of the holding surface of the sheet holder SH. In addition, in the state where the tension is applied to the predetermined area in the longitudinal direction and the width direction, the rear surface portion corresponding to the predetermined area of the sheet material S is changed in accordance with the flat reference surface so as to be flattened. In addition, the predetermined area of the flattened sheet material is irradiated with an energy beam so as to form a pattern thereon.