The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Nov. 04, 2009
Applicants:
Demetrius Sarigiannis, Grand Island, NY (US);
M. Mushtaq Ahmed, Pittsford, NY (US);
Inventors:
Demetrius Sarigiannis, Grand Island, NY (US);
M. Mushtaq Ahmed, Pittsford, NY (US);
Assignee:
Praxair Technology, Inc., Danbury, CT (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B01F 3/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to a vapor or liquid phase reagent dispensing apparatus that may be used for dispensing vapor or liquid phase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. The vapor phase reagent dispensing apparatus has a single port capable of receiving a carrier gas and dispensing a vapor phase reagent. The liquid phase reagent dispensing apparatus has a single port capable of receiving an inert gas and dispensing a liquid phase reagent.