The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2012
Filed:
Jun. 16, 2010
Kenji Shibata, Tsukuba, JP;
Hideki Sato, Hamamatsu, JP;
Kazufumi Suenaga, Tsuchiura, JP;
Akira Nomoto, Kasumigaura, JP;
Kenji Shibata, Tsukuba, JP;
Hideki Sato, Hamamatsu, JP;
Kazufumi Suenaga, Tsuchiura, JP;
Akira Nomoto, Kasumigaura, JP;
Hitachi Cable, Ltd., Tokyo, JP;
Abstract
To stably provide a KNN piezoelectric thin film element having piezoelectric characteristics replaceable with a PZT thin film. A piezoelectric thin film element includes: a piezoelectric thin film on a substrate, having an alkali niobium oxide series perovskite structure expressed by a general formula (KNa)NbO(0<x<1), wherein an intensity of a higher angle side skirt field is stronger than an intensity of a lower angle side skirt field of a diffraction peak in a KNN (002) diffraction peak in an X-ray diffraction 2θ/θ pattern of the piezoelectric thin film element.