The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2012
Filed:
May. 27, 2005
Applicants:
Matthew I. Egbe, West Norriton, PA (US);
Darryl W. Peters, Stewartsville, NJ (US);
Inventors:
Matthew I. Egbe, West Norriton, PA (US);
Darryl W. Peters, Stewartsville, NJ (US);
Assignee:
Air Products and Chemicals, Inc., Allentown, PA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23G 1/00 (2006.01); C23G 1/02 (2006.01); B08B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a method used to remove post etch organic and inorganic residue as well polymeric residues and contaminants from semiconductor substrates. In one aspect, the method involves contacting the substrate with a composition are comprised of a water soluble organic solvent, a sulfonic acid and water.