The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Nov. 29, 2005
Michael Loeken, Juelich, DE;
Jakob Willi Neff, Kelmis, BE;
Juergen Klein, Aachen, DE;
Sven Probst, Aachen, DE;
Michael Loeken, Juelich, DE;
Jakob Willi Neff, Kelmis, BE;
Juergen Klein, Aachen, DE;
Sven Probst, Aachen, DE;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
The present invention relates to a method of operating an electrical discharge device () comprising at least one first electrode () and at least one second electrode () at a distance therefrom, which electrodes are electrically connected to a power supply () and, upon ignition of a first gas discharge () between the electrodes (), transmit an electrical current (I), as a result of which a plasma () is produced in a working gas (), which plasma emits radiation (), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle () into a chamber () outside the electrodes (). In order to prevent erosion at the electrodes (), it is proposed that the formation of a secondary plasma () in the chamber () is suppressed by a device ().