The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 24, 2012

Filed:

May. 01, 2009
Applicants:

Tomoyuki Hikosaka, Ichihara, JP;

Shiro Eguchi, Nishi-Shinbashi, JP;

Takayuki Suzuki, Ichihara, JP;

Nobuyasu Harada, Ichihara, JP;

Satoru Gohzaki, Ichihara, JP;

Shigekatsu Sato, Hitachi, JP;

Isao Hashimoto, Hitachi, JP;

Inventors:

Tomoyuki Hikosaka, Ichihara, JP;

Shiro Eguchi, Nishi-Shinbashi, JP;

Takayuki Suzuki, Ichihara, JP;

Nobuyasu Harada, Ichihara, JP;

Satoru Gohzaki, Ichihara, JP;

Shigekatsu Sato, Hitachi, JP;

Isao Hashimoto, Hitachi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

The electron beam irradiating apparatus with the monitoring device has an electron beam irradiating means for irradiating materials in an irradiation chamber. The monitoring device has a photographing means for imaging a lights emitted by irradiating an electron beam to the materials; a storage means that stores state of electron beam irradiation in advance; and a calculating means that processes an image, which is captured by the photographing means, to decide a state of electron beam irradiation. The storage means has stored at least three state of electron beam irradiation and also has stored image luminance associated with those states of electron beam irradiation. The calculating means loads the image, which is captured by the photographing means, to compare the loaded image with the image luminance stored in the storage means, thereby deciding a state of electron beam irradiation.


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