The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
May. 17, 2006
Takeshi Uchida, Tsukuba, JP;
Tetsuya Hoshino, Hitachi, JP;
Hiroki Terazaki, Tsukuba, JP;
Yasuo Kamigata, Tsukuba, JP;
Naoyuki Koyama, Tsukuba, JP;
Yoshio Honma, Kokubunji, JP;
Seiichi Kondoh, Kokubunji, JP;
Takeshi Uchida, Tsukuba, JP;
Tetsuya Hoshino, Hitachi, JP;
Hiroki Terazaki, Tsukuba, JP;
Yasuo Kamigata, Tsukuba, JP;
Naoyuki Koyama, Tsukuba, JP;
Yoshio Honma, Kokubunji, JP;
Seiichi Kondoh, Kokubunji, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi Chemical Company, Ltd., Tokyo, JP;
Abstract
Provided are a metal-polishing liquid that comprises an oxidizing agent, an oxidized-metal etchant, a protective film-forming agent, a dissolution promoter for the protective film-forming agent, and water; a method for producing it; and a polishing method of using it. Also provided are materials for the metal-polishing liquid, which include an oxidized-metal etchant, a protective film-forming agent, and a dissolution promoter for the protective film-forming agent.