The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Jan. 25, 2011
Bradley Paul Barber, Chatham, NJ (US);
Linus Albert Fetter, Morganville, NJ (US);
Harold Alexis Huggins, Watchung, NJ (US);
Ronald Eugene Miller, Riegelsville, PA (US);
Bradley Paul Barber, Chatham, NJ (US);
Linus Albert Fetter, Morganville, NJ (US);
Harold Alexis Huggins, Watchung, NJ (US);
Ronald Eugene Miller, Riegelsville, PA (US);
Agere Systems Inc., Allentown, PA (US);
Abstract
Forming a thin film acoustic device by patterning a layer of non-conducting material on a first side of a substrate to expose a portion of the first substrate side; depositing layers of conducting material on the layer of non-conducting material and the exposed portion of the first substrate side; depositing a layer of piezoelectric material on the layers of conducting material; depositing and patterning additional layers of material on the layer of piezoelectric material to form a first device electrode; depositing and patterning a masking layer on a second side of the substrate to expose a portion of the second substrate side; etching away the exposed substrate portion to expose the patterned layer of non-conducting material and a portion of the layers of conducting material; and etching away the exposed portion of the layers of conducting material to form a second device electrode.