The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2012
Filed:
Dec. 07, 2009
Eika Tsunemi, Kyoto, JP;
Nobuo Satoh, Kyoto, JP;
Kei Kobayashi, Kyoto, JP;
Hirofumi Yamada, Kyoto, JP;
Kazumi Matsushige, Kyoto, JP;
Eika Tsunemi, Kyoto, JP;
Nobuo Satoh, Kyoto, JP;
Kei Kobayashi, Kyoto, JP;
Hirofumi Yamada, Kyoto, JP;
Kazumi Matsushige, Kyoto, JP;
Kyoto University, Kyoto-shi, JP;
Abstract
Incident lightemitted from a laser light sourceis reflected on an upper surface of a cantilever, so that reflected lightenters light detection means. Since the incident lightand the reflected lightare in a plane not including a long axis of the cantilever, movements of the reflected lightdue to change in a deflection amount θ of the cantileverand due to change in a fine vertical movement amount z thereof are different in direction on the light detection means. This enables the change in the deflection amount θ of the cantileverand the change in the fine vertical movement amount z thereof to be separated from output of the light detection means