The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8224062 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 17, 2012

Filed:

Aug. 10, 2007
Applicants:

Yoshihiro Ohkura, Iwata, JP;

Yoshio Fukuda, Ebino, JP;

Inventors:

Yoshihiro Ohkura, Iwata, JP;

Yoshio Fukuda, Ebino, JP;

Assignee:

Yamaha Corporation, Hamamatsu-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/62 (2006.01);
U.S. Cl.
CPC ...
Abstract

An individually isolated wafer adapted to a semiconductor chip is subjected to inspection in which an infrared ray is irradiated onto the backside of the wafer whose surface is sealed with a resin layer such that the optical axis thereof perpendicularly or slantingly crosses the surface of the wafer, whereby an image clearly showing cracks formed in the wafer is produced based on the reflected ray. Before or after an exterior inspection process, a tape inspection process is performed by use of an image of the surface of a dicing tape, in which a plurality of semiconductor chips are once attached onto and then separated from, so as to detect at least one of a defective element, a crack mark, and a foreign mark with regard to the semiconductor chip subjected to inspection.


Find Patent Forward Citations

Ohkura, Yoshihiro. (2012). Method and apparatus for inspection of wafer and semiconductor device (U.S. Patent No. 8224062). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8224062

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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