The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2012
Filed:
Dec. 05, 2006
Tsutomu Horie, Kawasaki, JP;
Mitsufumi Naoe, Kawasaki, JP;
Tsutomu Horie, Kawasaki, JP;
Mitsufumi Naoe, Kawasaki, JP;
Fujitsu Semiconductor Limited, Yokohoma, JP;
Abstract
An inspection apparatus of a mask for exposure that has a light shielding regionand a half-tone regionon a transparent substrate, includes a storage unit stored with half-tone pattern area data specifying an existing area of the half-tone region, a pattern detection unitacquiring a binary image of an area in which to scan over the surface of the transparent substrate by a relative movement with respect to the transparent substrate, and a control unitmaking effective a detecting operation of the pattern detection unit in the area on the transparent substrate that is specified by the half-tone pattern area data, and making ineffective the detecting operation of the pattern detection unit outside the specified area.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile