The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2012
Filed:
Mar. 25, 2008
Khurshed Sorabji, San Jose, CA (US);
Alexander Lerner, San Jose, CA (US);
Joseph Ranish, San Jose, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Bruce Adams, Portland, OR (US);
Mehran Behdjat, San Jose, CA (US);
Rajesh Ramanujam, Cupertino, CA (US);
Khurshed Sorabji, San Jose, CA (US);
Alexander Lerner, San Jose, CA (US);
Joseph Ranish, San Jose, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Bruce Adams, Portland, OR (US);
Mehran Behdjat, San Jose, CA (US);
Rajesh Ramanujam, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus and methods for achieving uniform heating or cooling of a substrate during a rapid thermal process are disclosed. More particularly, apparatus and methods for controlling the temperature of an edge ring supporting a substrate and/or a reflector plate during a rapid thermal process to improve temperature uniformity across the substrate are disclosed, which include a thermal mass or plate adjacent the edge ring to heat or cool the edge ring.