The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 17, 2012

Filed:

May. 18, 2010
Applicant:

Jeong-mo Hwang, Colorado Springs, CO (US);

Inventor:

Jeong-Mo Hwang, Colorado Springs, CO (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 21/336 (2006.01); H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for semiconductor fabrication. The method includes providing a silicon substrate and forming a tunnel oxide layer over the silicon substrate. Thereafter, a nitride layer is formed over the tunnel oxide layer. The nitride layer and the tunnel oxide layer are etched except where at least one nonvolatile silicon oxide nitride oxide silicon (SONOS) transistor is formed. Additionally, oxide layers are simultaneously formed over the nitride layer corresponding to where at bast one SONOS memory transistor is formed and over the exposed silicon substrate corresponding to where at least one metal oxide semiconductor (MOS) transistor is formed.


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