The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2012
Filed:
Apr. 16, 2009
Wei Yang, Minnetonka, MN (US);
Alex Gu, Plymouth, MN (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
A radial turbomolecular pump comprising an electrostatically levitated rotor with a high compression ratio and pump speed at a chip-scale level. The levitated rotor can be sandwiched between a stator plate and a driver and multiple concentric rings of microblades can be fabricated on the rotor plate and the stator plate. The center portions of the driver and the base plate include concentric ring electrodes for rotor levitation by electrostatic forces. The space between two concentric rings of microblades forms a groove that is wide enough to receive the microblades from the opposing disk. The stator disk can be fixed and the rotor disk spins such that the rotor microblades move tangentially relative to the stator microblades. The microblades can be tilted at an angle from the tangent, facilitating momentum transfer to gas molecules in the radial direction.