The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2012
Filed:
Apr. 27, 2011
Chen-wei Ku, New Taipei, TW;
Pao-yi LU, New Taipei, TW;
Chin-ming Lin, New Taipei, TW;
Jain-ping Sheng, New Taipei, TW;
Chen-Wei Ku, New Taipei, TW;
Pao-Yi Lu, New Taipei, TW;
Chin-Ming Lin, New Taipei, TW;
Jain-Ping Sheng, New Taipei, TW;
Gudeng Precision Industrial Co, Ltd, New Taipei, unknown;
Abstract
An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.