The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
May. 29, 2009
Takeshi Fukuma, Ishikawa, JP;
Toshio Ando, Ishikawa, JP;
Yasutaka Okazaki, Ishikawa, JP;
National University Corporation Kanazawa University, Ishikawa, JP;
Abstract
A scanner device is provided which enables high-frequency scanning and can increase the speed of a scanning probe microscope. A scanner device () used for a scanning probe microscope includes a Z actuator () which scans an object to be scanned in a scanning direction, and a Z actuator holder () which holds the Z actuator (). The Z actuator holder () holds the Z actuator () at a plurality of holding line parts which extend in the scanning direction and are separated from each other. For example, the Z actuator () has a rectangular cross-section, and the four edges of the Z actuator () are held by the Z actuator holder (). The Z actuator () is pressed into a holding hole () of the Z actuator holder ().