The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Aug. 23, 2010
Yizhen Lin, Gilbert, AZ (US);
Woo Tae Park, Singapore, SG;
Mark E. Schlarmann, Chandler, AZ (US);
Hemant D. Desai, Gilbert, AZ (US);
Yizhen Lin, Gilbert, AZ (US);
Woo Tae Park, Singapore, SG;
Mark E. Schlarmann, Chandler, AZ (US);
Hemant D. Desai, Gilbert, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A device () includes sensors () that sense different physical stimuli. A pressure sensor () includes a reference element () and a sense element (), and an inertial sensor () includes a movable element (). Fabrication () entails forming () a first substrate structure () having a cavity (), forming a second substrate structure () to include the sensors (), and coupling () the substrate structures so that the first sensor () is aligned with the cavity () and the second sensor () is laterally spaced apart from the first sensor (). Forming the second structure () includes forming () the sense element () from a material layer () of the second structure () and following coupling () of the substrate structures, concurrently forming () the reference element () and the movable element () in a wafer substrate () of the second structure ().