The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2012

Filed:

Mar. 03, 2008
Applicants:

Tzung K. Hsiai, Santa Monica, CA (US);

Gopikrishnan Soundararajan, Alisa Viejo, CA (US);

Eun Sok Kim, Rancho Palos Verdes, CA (US);

Hongyu Yu, Mesa, AZ (US);

Mahsa Rouhanizadeh, Newport Beach, CA (US);

Christina Tiantian Lin, Santa Rosa, CA (US);

Inventors:

Tzung K. Hsiai, Santa Monica, CA (US);

Gopikrishnan Soundararajan, Alisa Viejo, CA (US);

Eun Sok Kim, Rancho Palos Verdes, CA (US);

Hongyu Yu, Mesa, AZ (US);

Mahsa Rouhanizadeh, Newport Beach, CA (US);

Christina Tiantian Lin, Santa Rosa, CA (US);

Assignee:

University of Southern California, Los Angeles, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.


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