The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Dec. 20, 2006
Joel Huston, San Jose, CA (US);
Jeffery Tobin, Mountain View, CA (US);
Christophe Marcadal, Santa Clara, CA (US);
Joel Huston, San Jose, CA (US);
Jeffery Tobin, Mountain View, CA (US);
Christophe Marcadal, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas coupler is capable of conducting gas between a gas component, gas source and substrate processing chamber. The gas coupler comprises a metal block comprising a gas component seating surface having a plurality of gas component coupling ports. The block also has a plurality of sidewalls at right angles to the gas component seating surface, each sidewall comprising a counterbored gas orifice. A plurality of right-angled internal passageways are each connected to a gas component coupling port. Each internal passageway terminates at counterbored gas orifice on a different sidewall surface so that each gas component coupling port is fluidly connected to a different sidewall.