The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Apr. 06, 2009
Andrea Baccini, Treviso, IT;
Marco Galiazzo, Padova, IT;
Daniele Andreola, Povegliano, IT;
Luigi DE Santi, Spresiano, IT;
Christian Zorzi, Treviso, IT;
Tommaso Vercesi, Treviso, IT;
Andrea Baccini, Treviso, IT;
Marco Galiazzo, Padova, IT;
Daniele Andreola, Povegliano, IT;
Luigi De Santi, Spresiano, IT;
Christian Zorzi, Treviso, IT;
Tommaso Vercesi, Treviso, IT;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.