The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2012
Filed:
Apr. 06, 2011
Hong Shih, Walnut, CA (US);
Yaobo Yin, Pleasanton, CA (US);
Jason Augustino, Fremont, CA (US);
Catherine Zhou, Oakland, CA (US);
Armen Avoyan, Oakland, CA (US);
Hong Shih, Walnut, CA (US);
Yaobo Yin, Pleasanton, CA (US);
Jason Augustino, Fremont, CA (US);
Catherine Zhou, Oakland, CA (US);
Armen Avoyan, Oakland, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Methods of cleaning backing plates of electrode assemblies, or electrode assemblies including a backing plate and an electrode plate are provided. The methods can be used to clean backing plates and electrode plates made of various materials, such as silicon electrode plates and graphite and aluminum backing plates. The backing plates and electrode assemblies can be new, used or refurbished. A flushing fixture that can be used in the cleaning methods is also provided, the flushing fixture comprising a base plate comprising a recessed inner portion including and an upper surface configured to support the backing plate or the electrode assembly, and a cover plate configured to cover the base plate, the cover plate including at least one liquid passage through which a flushing liquid is introduced into an interior of the flushing fixture defined by the base plate and cover plate.