The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
Jun. 29, 2009
Lawrence J. Daquino, Los Gatos, CA (US);
Edwin DE Groot, Saratoga, CA (US);
Donald J. Schremp, San Jose, CA (US);
Lawrence J. DaQuino, Los Gatos, CA (US);
Edwin de Groot, Saratoga, CA (US);
Donald J. Schremp, San Jose, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
A lens stage for use in a scanning system is provided. In certain embodiments, the lens stage comprises: a) a support comprising a first rail and a second rail, in which the first rail and the second rail are mounted to the support in parallel; and b) a linearly moveable lens assembly comprising: i) a voice coil comprising a moving coil that moves in a direction parallel to the rails; ii) a lens; iii) a bracket that is attached to: a) the moving coil and b) the lens, and moveably engaged with the rails via a set of bearing cars; and iv) means to reduce force exerted on the set of bearing cars due to thermal expansion of the moving coil.