The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
May. 27, 2009
Applicants:
Jun Choi, Pohang-si, KR;
Jae Koo Lee, Pohang-si, KR;
Jae Yoon Sim, Pohang-si, KR;
Inventors:
Assignee:
Postech Academy Industry Foundation, Pohang-si, Gyeongsangbuk-do, KR;
Primary Examiner:
Int. Cl.
CPC ...
H02J 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided is a portable power supply apparatus for generating microwave plasma, capable of minimizing a power reflected from a plasma generation apparatus and improving power consumption of the plasma generation apparatus by generating the plasma by using a microwave having a specific frequency, monitoring the power reflected from the plasma generation apparatus after the generation of the plasma, detecting a changed impedance matching condition, and correcting the frequency.