The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
Jun. 23, 2009
Fumio Kimura, Chiba, JP;
Ryohei Kamiya, Chiba, JP;
Hiroshi Takahashi, Chiba, JP;
Ryuta Mitsusue, Chiba, JP;
Yoshifumi Yoshida, Chiba, JP;
Fumio Kimura, Chiba, JP;
Ryohei Kamiya, Chiba, JP;
Hiroshi Takahashi, Chiba, JP;
Ryuta Mitsusue, Chiba, JP;
Yoshifumi Yoshida, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
An electrostatic vibrator has a vibrating plate including beam-shaped vibrating parts each fixed at opposite ends thereof and configured for electrostatic actuation to perform flexural vibration, and temperature compensation parts connected to the vibrating parts. A silicon oxide film covers each of the vibrating parts but not the temperature compensation parts. A substrate is mounted in parallel relation to the vibrating plate. An oxide layer is disposed between the substrate to the vibrating plate. Electrodes are formed on the substrate and arranged on opposite sides of each of the vibrating parts.