The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2012
Filed:
Apr. 12, 2011
Nathan Ray Perkins, Fort Collins, CO (US);
Timothy Arthur Valade, Fort Collins, CO (US);
Albert William Wang, Fort Collins, CO (US);
Nathan Ray Perkins, Fort Collins, CO (US);
Timothy Arthur Valade, Fort Collins, CO (US);
Albert William Wang, Fort Collins, CO (US);
Avago Technologies Wireless IP (Singapore) Pte. Ltd., Singapore, SG;
Abstract
A method of fabricating a semiconductor device is disclosed. The method comprises patterning a photoresist over a compound semiconductor substrate; reducing a width of the photoresist; forming a hardmask over the substrate and not over the photoresist; removing the photoresist; etching to form and opening down to the substrate; forming a gate in the opening; and removing the hardmask except beneath the gate.