Amorphous lithium lanthanum titanate thin films manufacturing method

Abstract

An amorphous lithium lanthanum titanate (LLTO) thin film is produced by the sol-gel method wherein a polymer is mixed with a liquid alcohol to form a first solution. A second solution is then prepared by mixing a lanthanum alkoxide with an alcohol. The first solution is then mixed with the lanthanum based second solution. A lithium alkoxide and a titanium alkoxide are then also added to the lanthanum based second solution. This process produces a batch of LLTO precursor solution. The LLTO precursor solution is applied to a substrate to form a precursor layer which is then dried. The coating techniques that may be used include spin coating, spraying, casting, dripping, and the like, however, the spin coating technique is the preferred method recited herein.