The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 26, 2012

Filed:

Dec. 11, 2009
Applicants:

Steven M. Zuniga, Soquel, CA (US);

Derek G. Aqui, Portland, OR (US);

Andrew J. Nagengast, Sunnyvale, CA (US);

Keenan Leon Guerrero, Boise, ID (US);

Harish K. Bolla, Sunnyvale, CA (US);

Aditya Agarwal, Sunnyvale, CA (US);

Inventors:

Steven M. Zuniga, Soquel, CA (US);

Derek G. Aqui, Portland, OR (US);

Andrew J. Nagengast, Sunnyvale, CA (US);

Keenan Leon Guerrero, Boise, ID (US);

Harish K. Bolla, Sunnyvale, CA (US);

Aditya Agarwal, Sunnyvale, CA (US);

Assignee:

Twin Creeks Technologies, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.


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