The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Dec. 03, 2009
Masao Ishikawa, Kanagawa-ken, JP;
Masao Ishikawa, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A method for manufacturing a semiconductor device includes: forming a stacked body of a dielectric layer including a silicon oxide and a conductive layer including silicon above a substrate; and forming a hole penetrating through the dielectric layer and the conductive layer in the stacked body, the forming the hole including: forming a first mask layer including a silicon oxide above the stacked body; etching the conductive layer while using the first mask layer as a mask; and forming a second mask layer having more silicon content than the dielectric layer above the first mask layer to etch the dielectric layer while using the second mask layer as a mask.