The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Jun. 18, 2010
Cornelius Petrus Elisabeth Schepens, Beuningen, NL;
Cong Quoc Khieu, San Jose, CA (US);
Robertus Petrus Van Kampen, Hertogenbosch, NL;
Cornelius Petrus Elisabeth Schepens, Beuningen, NL;
Cong Quoc Khieu, San Jose, CA (US);
Robertus Petrus van Kampen, Hertogenbosch, NL;
Cavendish Kinetics Inc., San Jose, CA (US);
Abstract
Embodiments disclosed herein generally relate to switches that utilize micro-electromechanical systems (MEMS). By replacing transistors in many devices with switches such as MEMS switches, the devices may be used for logic applications. MEMS switches may be used in devices such as FPGAs, NAND devices, nvSRAM devices, AMS chips and general memory logic devices. The benefit of utilizing MEMS devices in place of transistors is that the transistors utilize more space on the chip. Additionally, the MEMS devices can be formed in the BEOL without having any negative impacts on the FEOL or necessitating the use of additional layers within the chip.