Reduced-pressure drying method, method of manufacturing functional film, method of manufacturing electro-optic device, electro-optic device, liquid crystal display device, organic el display device, and electronic apparatus

Abstract

A reduced-pressure drying method includes: decompressing a second chamber communicated with a first chamber housing a base material coated with a liquid substance containing a solvent to predetermined operative pressure by a decompressing device; leaving the first chamber closed in response to reaching the predetermined operative pressure until the evaporated solvent raising the pressure in the first chamber to predetermined pressure; communicating the first chamber with the pressure raised to the predetermined pressure with the second chamber; and discharging the vapor of the solvent dispersed in the first and the second chambers by the decompressing device.