The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Dec. 05, 2007
Marc Loschonsky, Freiburg, DE;
Armin Dadgar, Berlin, DE;
Leonhard Reindl, Freiburg, DE;
Albert-Ludwigs-Universitat Freiburg, Freiburg, DE;
Abstract
The invention relates to piezoelectric sensor arrangements, especially sensor arrangements that can be operated in a measuring fluid, in order to be able to detect, for example, elastic properties of the measuring fluid itself or the presence and/or concentration of analyte molecules in the fluid. According to the invention, the sensor arrangement comprises an acoustic resonator which has a sensitive region and is arranged such that a resonance frequency of the sensor arrangement varies according to properties of the measuring fluid. The acoustic resonator is formed by a piezoelectric thin layer resonator and the sensitive region is produced by means of epitaxy, such that transversally polarized vibration modes can be induced.