The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Mar. 02, 2007
Akira Miyamoto, Osaka, JP;
Daisuke Sado, Osaka, JP;
Akira Okamoto, Osaka, JP;
Hideki Matsuo, Osaka, JP;
Yasuhiro Nishimori, Osaka, JP;
Akira Miyamoto, Osaka, JP;
Daisuke Sado, Osaka, JP;
Akira Okamoto, Osaka, JP;
Hideki Matsuo, Osaka, JP;
Yasuhiro Nishimori, Osaka, JP;
DAIHEN Corporation, Osaka, JP;
Abstract
A conveying device A is disposed inside a vacuum chamber B, includes a fixation base; a swivel base which is held rotatably with respect to the fixation base; linear movement mechanismsA,B supported by the swivel base; and handsA,B supported by the linear movement mechanismsA,B; and a transports work W placed on the handsA,B by operation of the linear movement mechanismA,B. Radiation platesare provided at appropriate locations on a lower surface side of the swivel base or of the linear movement mechanismsA,B. The vacuum chamber is provided with heat absorption plateson a wall which faces the lower surface side of the swivel base