The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2012
Filed:
Jul. 23, 2008
Shuran Sheng, Santa Clara, CA (US);
Yong Kee Chae, Pleasanton, CA (US);
Soo Young Choi, Fremont, CA (US);
Tae Kyung Won, San Jose, CA (US);
Liwei LI, Sunnyvale, CA (US);
Shuran Sheng, Santa Clara, CA (US);
Yong Kee Chae, Pleasanton, CA (US);
Soo Young Choi, Fremont, CA (US);
Tae Kyung Won, San Jose, CA (US);
Liwei Li, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present invention generally relate to solar cells and methods and apparatuses for forming the same. More particularly, embodiments of the present invention relate to thin film multi-junction solar cells and methods and apparatuses for forming the same. Embodiments of the present invention also include an improved thin film silicon solar cell, and methods and apparatus for forming the same, where one or more of the layers in the solar cell comprises at least one amorphous silicon layer that has improved electrical characteristics and mechanical properties, and is capable of being deposited at rates many times faster than conventional amorphous silicon deposition processes.